P-7100 Series Ultra-Miniature Pressure Sensors

Nidec’s P-7100 sensors are ideal for manufacturing equipment or industrial automation systems when space is at a premium

Nidec Copal Electronics’ P-7100 series ultra-miniature sensors are constructed using SUS316L stainless steel double diaphragm structure. The P-7100 boasts a compact and lightweight design ideal for use as an embedded sensor for applications ranging from semiconductor production equipment, industrial automation systems to medical devices. The double diaphragm structure consists of two parts: a silicon diaphragm whereby a piezo-resistive bridge is directly fabricated on and a corrosive resistant stainless steel diaphragm. The sealed cavity created by these two diaphragms is filled with silicon oil which acts as a medium to transfer the load from the outer stainless steel diaphragm to the inner silicon chip. Using the chip-on-board (COB) fabrication technology, the P-7100 has a built-in temperature compensator to achieve a reliable high accuracy reading. The P-7100 is manufactured and assembled in-house at Nidec Copal Electronics using an integrated manufacturing process to ensure high-efficiency production and tight quality control.